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公开(公告)号:US20200098854A1
公开(公告)日:2020-03-26
申请号:US16697484
申请日:2019-11-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jong-Min LEE , Jongryul JUN , Eun A. KIM , Jung-Bum LIM
IPC: H01L49/02 , H01L27/108 , H01L27/08
Abstract: Decoupling structures are provided. The decoupling structures may include first conductive patterns, second conductive patterns and a unitary supporting structure that structurally supports the first conductive patterns and the second conductive patterns. The decoupling structures may also include a common electrode disposed between ones of the first conductive patterns and between ones of the second conductive patterns. The first conductive patterns and the common electrode are electrodes of a first capacitor, and the second conductive patterns and the common electrode are electrodes of a second capacitor. The unitary supporting structure may include openings when viewed from a plan perspective. The first conductive patterns and the second conductive patterns are horizontally spaced apart from each other with a separation region therebetween, and none of the openings extend into the separation region.