SEMICONDUCTOR MEMORY DEVICE
    1.
    发明申请

    公开(公告)号:US20250056789A1

    公开(公告)日:2025-02-13

    申请号:US18620333

    申请日:2024-03-28

    Abstract: The present disclosure relates to semiconductor memory devices. An example semiconductor memory device comprises a substrate, a structure including word lines and interlayer insulating films alternately stacked on the substrate, a channel region disposed between two adjacent word lines in a vertical direction, a first source/drain region disposed on a first side of the channel region, a second source/drain region disposed on a second side of the channel region, a bit line which extends in the vertical direction on the substrate and is connected to the first source/drain region, a capping insulating film disposed between the bit line and the word lines, and a data storage connected to the second source/drain region. At least a part of the first source/drain region protrudes from a sidewall of the capping insulating film toward the bit line.

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