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公开(公告)号：US20250076776A1
公开(公告)日：2025-03-06
申请号：US18595753
申请日：2024-03-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： SEUNGPYO HONG , SUNGHYUP KIM , INJAE LEE , DAEGEUN YOON , TAEWOONG UM
Abstract: An extreme ultraviolet (EUV) source includes a housing providing a light-collecting space having a cone shape becoming narrower in a first direction, an EUV collector disposed at a first end portion of the housing and including a reflection surface disposed toward the light-collecting space, and an exhaust pipe coupled to the housing and providing an exhaust flow path connected to the light-collecting space, wherein the exhaust pipe extends from the housing and forms an acute angle with the housing toward a second end portion of the housing.
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