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公开(公告)号:US20230328951A1
公开(公告)日:2023-10-12
申请号:US18097675
申请日:2023-01-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: DONG-SIK PARK , SOOHO SHIN , CHEOLHO BAEK
IPC: H10B12/00
CPC classification number: H10B12/033 , H10B12/50 , H10B12/315
Abstract: A semiconductor device may include a substrate including a cell array region, a data storage structure provided on the cell array region of the substrate, the data storage structure including a bottom electrode, a top electrode on the bottom electrode, and a dielectric layer interposed between the bottom electrode and the top electrode, a blocking layer provided on a top surface of the top electrode, a lower interlayer insulating layer provided on the blocking layer, and a lower contact penetrating the lower interlayer insulating layer and electrically connected to the top electrode. At least a portion of a side surface of the lower contact may contact the blocking layer.