公开(公告)号：US20210136966A1

公开(公告)日：2021-05-06

申请号：US16638645

申请日：2018-07-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyun-Tae JANG ,  Min PARK ,  Byung Hoon LEE ,  Youngchul LEE ,  Changjoon LEE ,  Jiyoung JANG ,  Youngjun MOON ,  Minyoung PARK ,  Jeonggen YOON ,  Won CHOI ,  Siho JANG

IPC: H05K13/04 ,  H01L33/00 ,  H05K13/02

Abstract: According to various embodiments, provided is an electrical element transfer apparatus comprising: a fixing jig in which each of a plurality of electrical elements is arranged at a predetermined interval; a movement jig movably arranged at an upper part of the fixing jig, and including a plurality of first accommodating grooves for accommodating at least a part of each of the plurality of electrical elements; and an attraction device arranged around the movable jig and attaching each of the plurality of electrical elements through the movable jig to the first accommodating groove of the movable jig through magnetic force. Additional various embodiments are possible.

公开(公告)号：US20190179225A1

公开(公告)日：2019-06-13

申请号：US16016779

申请日：2018-06-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hwan Seok SEO ,  Myoung Soo LEE ,  Byung Hoon LEE

IPC: G03F1/22 ,  G03F1/54 ,  G03F1/52 ,  G03F1/42

Abstract: A photomask is provided. The photomask comprises: a low thermal expansion material (LTEM) substrate including a first surface and a second surface; a reflective layer disposed on the first surface of the low thermal expansion material substrate and including first material layers and second material layers, which are stacked alternately; a light absorbing pattern on the reflective layer; and a conductive layer on the second surface of the low thermal expansion material substrate, wherein the low thermal expansion material substrate includes a correction defect correcting the light absorbing pattern, and the conductive layer is one of ruthenium oxide (RuO2), iridium oxide (IrO2), and/or a combination thereof.