公开(公告)号：US20240355580A1

公开(公告)日：2024-10-24

申请号：US18471259

申请日：2023-09-20

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yeny YIM ,  Dongok KIM ,  Wonhee LEE ,  Subong SHON ,  Hansaem PARK ,  Byeongkyu CHA

IPC: H01J37/26 ,  G06T5/50 ,  G06T7/13 ,  G06T7/60 ,  G06V20/70

CPC classification number: H01J37/26 ,  G06T5/50 ,  G06T7/13 ,  G06T7/60 ,  G06V20/70 ,  G06T2207/10056 ,  G06T2207/20104 ,  G06T2207/20221

Abstract: A method of operating a transmission electron microscope (TEM) image processing apparatus, includes acquiring a TEM image from a TEM facility, performing weak labeling of the TEM image, generating ground truth for a partially labeled TEM image using a guide model, performing segmentation using training data consisting of a pair of the TEM image and the ground truth; measuring a device core structure according to a result of the segmentation, and visualizing a measurement result according to the device core structure, and storing the same in a database.