公开(公告)号：US20220120662A1

公开(公告)日：2022-04-21

申请号：US17215185

申请日：2021-03-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sangwoo BAE ,  Boris AFINOGENOV ,  Maksim RIABKO ,  Anton MEDVEDEV ,  Aleksandr SHOROKHOV ,  Anton SOFRONOV ,  Ingi KIM ,  Jungwook KIM ,  Youngjoo LEE ,  Kyunghun HAN

IPC: G01N15/14

Abstract: A particle inspection method includes irradiating a spatially modulated modulation beam onto a surface of a substrate and detecting an absorption light signal from a reflection beam generated through reflection of the spatially modulated modulation beam by the substrate.