公开(公告)号：US20250155351A1

公开(公告)日：2025-05-15

申请号：US18947891

申请日：2024-11-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Deokhyeon Kwon ,  Azer YALIN

IPC: G01N15/075 ,  G01N33/00

Abstract: An optical measurement method includes emitting light to an optical beam path cell including a first mirror and a second mirror that faces the first mirror, forming an optical beam path by reflecting the light between the first mirror and the second mirror, obtaining an optical signal including an optical characteristic value based on an interaction of the light with a sample in the optical beam path, separating the optical signal into a gas signal and a particle signal, and determining a concentration of particles in the sample based on the particle signal, where the determining of the concentration of the particles includes fitting the particle signal into a first distribution function indicating the optical characteristic value and a frequency of the optical characteristic value, and the concentration of particles is determined based o999n first shape information about the first distribution function.