公开(公告)号：US20160144396A1

公开(公告)日：2016-05-26

申请号：US14743757

申请日：2015-06-18

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hee Sun JANG ,  Joo Seob AHN ,  Jae Ha LIM ,  Yong Hyun JIN

IPC: B05C21/00

CPC classification number: C23C14/042 ,  H01L51/56

Abstract: A thin film deposition mask assembly and an in-line type thin film deposition apparatus for deposition of an organic material on a substrate, the mask assembly including a carrier, the carrier being configured to mount and carry a substrate; and a mask, the mask being integrally coupled with the carrier, and having an opening for depositing an organic material on the substrate.

Abstract translation: 一种薄膜沉积掩模组件和用于在基底上沉积有机材料的直列式薄膜沉积装置，所述掩模组件包括载体，所述载体被配置为安装和承载基底; 以及掩模，所述掩模与所述载体一体地联接，并且具有用于在所述基底上沉积有机材料的开口。