公开(公告)号：US20150299843A1

公开(公告)日：2015-10-22

申请号：US14752708

申请日：2015-06-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jung-Bae SONG ,  Beohm-Rock CHOI, I ,  Sang-Pil LEE ,  Young-Rok SONG

IPC: C23C14/24 ,  C23C14/04

CPC classification number: C23C14/243 ,  C23C14/042 ,  C23C14/50 ,  C23C14/56 ,  H01L27/3216 ,  H01L27/3218 ,  H01L51/5278

Abstract: Each of thin film deposition assemblies of a thin film deposition apparatus includes: a deposition source that includes a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet arranged opposite to the deposition source nozzle unit and having a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates arranged in the first direction, the barrier plate assembly being arranged between the deposition source nozzle unit and the patterning slit sheet. The thin film deposition apparatus and the substrate are separated from each other and are movable relative to each other. The deposition material includes a material to produce the thin film of a red (R), green (G) or blue (B) emission layer, or an auxiliary layer.

Abstract translation: 薄膜沉积设备的每个薄膜沉积组件包括：沉积源，其包括沉积材料; 沉积源喷嘴单元，布置在沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对布置并且具有沿所述第一方向布置的多个图案化狭缝; 以及阻挡板组件，其包括沿着所述第一方向布置的多个阻挡板，所述阻挡板组件布置在所述沉积源喷嘴单元和所述图案化缝隙片之间。 薄膜沉积装置和基板彼此分离并且可相对于彼此移动。 沉积材料包括产生红色（R），绿色（G）或蓝色（B）发射层或辅助层的薄膜的材料。