公开(公告)号：US20160077449A1

公开(公告)日：2016-03-17

申请号：US14635339

申请日：2015-03-02

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jung-Chul HEO ,  Hi-Kuk LEE ,  Jae-Hyuk CHANG ,  Sang-Hyun LEE ,  Jung-In PARK ,  Sang-Hyun YUN ,  Ki-Beom LEE ,  Hyun-Seok KIM ,  Kab-Jong SEO ,  Jun-Ho SIM ,  Byoung-Min YUN ,  Sang-Don JANG ,  Jae-Young JANG ,  Chang-Hoon KIM

IPC: G03F7/20 ,  H01L27/12 ,  H01L29/786

CPC classification number: G03F7/70508 ,  G03F7/2022 ,  G03F7/2051 ,  G03F7/702 ,  G03F7/70291 ,  G03F7/70391 ,  H01L27/1222 ,  H01L27/124 ,  H01L27/1259 ,  H01L29/78669 ,  H01L29/78693 ,  H01L29/78696

Abstract: A maskless exposure device includes an exposure head including a digital micro-mirror device. The digital micro-mirror device is configured to transmit a source beam applied from an exposure source to a substrate. A system control part is configured to control the digital micro-mirror device by using a graphic data system file. The graphic data system file includes data for forming a source electrode, a drain electrode and a channel portion disposed between the source electrode and the drain electrode. The graphic system file includes data for forming the channel portion extending in a diagonal direction with respect to a scan direction of the exposure head.

Abstract translation: 无掩模曝光装置包括具有数字微镜装置的曝光头。 数字微镜装置被配置为将从曝光源施加的源光束传输到衬底。 系统控制部分被配置为通过使用图形数据系统文件来控制数字微镜装置。 图形数据系统文件包括用于形成源电极，漏电极和设置在源电极和漏电极之间的沟道部分的数据。 图形系统文件包括用于形成相对于曝光头的扫描方向沿对角线方向延伸的通道部分的数据。