公开(公告)号：US20130217164A1

公开(公告)日：2013-08-22

申请号：US13659827

申请日：2012-10-24

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hee-Cheul KANG ,  Jong-Heon KIM ,  Yun-Ho CHANG ,  Seok-Rak CHANG ,  Cheol-Lae ROH

IPC: H01L33/08

CPC classification number: C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/568 ,  H01L51/0008 ,  H01L51/56

Abstract: An organic layer deposition apparatus and a method of manufacturing an organic light emitting display apparatus by using the organic layer deposition apparatus. An organic layer deposition apparatus includes: a carrier including a chuck on which a substrate is mounted to form an organic layer; a scanning unit including a deposition unit for discharging a deposition raw material, and a patterning slit sheet having a plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction; and a chamber accommodating the carrier and the scanning unit, the scanning unit being arranged to be spaced apart from the substrate and movable relative to the carrier.

Abstract translation: 一种有机层沉积装置和通过使用有机层沉积装置制造有机发光显示装置的方法。 有机层沉积装置包括：载体，其包括卡盘，其上安装有基材以形成有机层; 扫描单元，其包括用于排出沉积原料的沉积单元和具有多个图案化缝隙的图案化缝隙片，所述图案化缝隙片在垂直于所述第一方向的第一方向或第二方向中的至少一个中小于所述衬底 第一方向 以及容纳所述载体和所述扫描单元的室，所述扫描单元布置成与所述基板间隔开并且能够相对于所述载体移动。