公开(公告)号：US20160048081A1

公开(公告)日：2016-02-18

申请号：US14612648

申请日：2015-02-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JUN-HO SIM ,  JUNG-IN PARK ,  KI-BEOM LEE ,  HI-KUK LEE ,  HYUN-SEOK KIM ,  KAB-JONG SEO ,  SANG-HYUN YUN ,  SANG-HYUN LEE ,  JUNG-CHUL HEO ,  JONG-JOO KIM ,  CHANG-HOON KIM

IPC: G03F7/20 ,  G02B26/08

CPC classification number: G03F7/70641 ,  G02B26/0833 ,  G03F7/2053 ,  G03F7/70291 ,  G03F7/70383 ,  G03F7/70391

Abstract: A maskless exposure device includes a stage on which a substrate is disposed, an optical head, and an optical source part. The optical head irradiates light to the substrate. The light source part provides the optical head with a light. The optical head irradiates the light, according to an average-focus distance, to the substrate. The average-focus distance is determined by averaging best-focus distances for a plurality of regions of the substrate, respectively.

Abstract translation: 无掩模曝光装置包括其上设置有基板的台，光学头和光源部。 光头将光照射到基板上。 光源部分为光头提供光。 光头根据平均焦距将光照射到基板上。 平均焦点距离分别通过对基板的多个区域的最佳聚焦距离进行平均来确定。

公开(公告)号：US20160091796A1

公开(公告)日：2016-03-31

申请号：US14738543

申请日：2015-06-12

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JUN-HO SIM ,  SANG-HYUN YUN ,  HI-KUK LEE ,  HYUN-SEOK KIM

IPC: G03F7/20

CPC classification number: G03F7/70058 ,  G03F7/70291 ,  G03F7/70508 ,  G03F9/7076

Abstract: A maskless exposure device includes an exposure head that includes a digital micro-mirror device configured to reflect a source beam received from an exposure source to a substrate to scan an exposure beam to the substrate, and a system control part configured to control the digital micro-mirror device using a graphic data system file. The graphic data system file includes data of an align-key. The align-key includes an X-align-key that extends in a direction parallel to a scan direction of the exposure head, and has a bar shape in a plan view, and a Y-align-key disposed adjacent to the X-align-key that has a frame shape in a plan view.

Abstract translation: 无掩模曝光装置包括曝光头，该曝光头包括被配置为将从曝光源接收的源光束反射到基板以扫描到基板的曝光光束的数字微镜装置，以及被配置为控制数字微处理器 镜像设备使用图形数据系统文件。 图形数据系统文件包括对齐键的数据。 对准键包括沿平行于曝光头的扫描方向的方向延伸的X对准键，并且在平面图中具有条形，并且邻近X对齐设置的Y对准键 在平面图中具有框架形状的键。

公开(公告)号：US20150205212A1

公开(公告)日：2015-07-23

申请号：US14322442

申请日：2014-07-02

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： KI-BEOM LEE ,  HI-KUK LEE ,  CHA-DONG KIM ,  CHANG-HOON KIM ,  JUNG-IN PARK ,  KAB-JONG SEO ,  JUN-HO SIM ,  SANG-HYUN YUN ,  JAE-HYUK CHANG ,  HYUN-SEOK KIM ,  SANG-HYUN LEE

IPC: G03F7/20

CPC classification number: G03F7/70291 ,  G03F7/70275

Abstract: A light exposure device is provided. The light exposure device includes a light source, a light modulation part, and a projection optical part. The light modulation part modulates the light based on a predetermined exposure pattern. The projection optical part projects the light from the light modulation part onto a substrate. The projection optical part includes a first optical part, a hole arrangement part, and a second optical part. The first optical part receives the light from the light modulation part. The first optical part includes a plurality of first lenses. The hole arrangement part emits the light from the first optical part. The second optical part emits the light from the hole arrangement part onto the substrate. The second optical part includes a plurality of second lenses. At least one of the first lenses and the second lenses is a transreflective lens.

Abstract translation: 提供曝光装置。 曝光装置包括光源，光调制部和投影光学部。 光调制部基于预定的曝光图案来调制光。 投影光学部件将来自光调制部的光投射到基板上。 投影光学部件包括第一光学部件，孔布置部分和第二光学部件。 第一光学部件接收来自光调制部分的光。 第一光学部件包括多个第一透镜。 孔布置部分发射来自第一光学部件的光。 第二光学部件将来自孔布置部分的光发射到基板上。 第二光学部件包括多个第二透镜。 第一透镜和第二透镜中的至少一个是透反透镜。