公开(公告)号：US20240145219A1

公开(公告)日：2024-05-02

申请号：US18331333

申请日：2023-06-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Min Gyu PARK ,  Sae Hong KIM ,  Jung Gon KIM ,  Kyung Joo MIN ,  Hee Yong LEE ,  Suk Jin JANG ,  Choel Min JANG

IPC: H01J37/32 ,  C23C16/30 ,  C23C16/455

CPC classification number: H01J37/32449 ,  C23C16/30 ,  C23C16/45563 ,  H01J37/32458 ,  H01J2237/3321

Abstract: An apparatus for manufacturing a display device includes a gas exhaust unit and a gas spray unit. The gas exhaust unit includes first and second sidewalls disposed side by side along a first direction, and an upper plate disposed on the first and second sidewalls, a first partition disposed between the first and second sidewalls and extending away from a lower surface of the upper plate in a second direction. The gas spray unit includes first and second spray portions spraying first and second gases in the second direction. The first partition includes first and second surfaces, a third surface connecting the first surface to the second surface, first and second horizontal openings formed at the first and second surfaces, a first vertical opening formed at the third surface, and a first sub exhaust path connecting the first and second horizontal openings, and the first vertical opening with each other.