公开(公告)号：US20160126507A1

公开(公告)日：2016-05-05

申请号：US14710738

申请日：2015-05-13

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Junhyeuk KO ,  Daewon BAEK ,  Eunji LEE

IPC: H01L51/56 ,  H01L27/32 ,  C23C14/04 ,  H01L51/00

CPC classification number: C23C14/042 ,  H01L27/3244 ,  H01L51/0011 ,  H01L51/5256 ,  H01L51/56

Abstract: A mask frame assembly includes a frame, and a mask tensioned on the frame in a first direction, the mask having a deposition pattern portion having a plurality of pattern holes therethrough, a deposition material being deposited on a substrate through the pattern holes, and a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in a second direction as a distance from the deposition pattern portion in the first direction increases, the second direction being oriented along a normal to the mask.

Abstract translation: 掩模框架组件包括框架和在第一方向上在框架上张紧的掩模，掩模具有沉积图案部分，其具有穿过其中的多个图案孔，沉积材料通过图案孔沉积在基板上，以及 在第一方向上从沉积图形部分延伸的虚拟部分，所述虚拟部分沿与第一方向上的沉积图案部分的距离在第二方向上具有增加的厚度，所述第二方向沿着掩模的法线定向。