公开(公告)号：US20140242515A1

公开(公告)日：2014-08-28

申请号：US13961458

申请日：2013-08-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Gwui-Hyun PARK ,  Pil Soon HONG ,  Jinho JU ,  Taegyun KIM ,  Jin-Su BYUN ,  Dong Min KIM ,  Seung Ki KIM ,  Doo Youn LEE

IPC: G03F7/008 ,  G03F7/20

CPC classification number: G03F7/0085 ,  G03F7/0007 ,  G03F7/0048 ,  G03F7/022 ,  G03F7/0236 ,  G03F7/20 ,  G03F7/30 ,  H01L21/312

Abstract: A photoresist composition including a binder resin including a novolac resin represented by Chemical Formula 1, a diazide photosensitive initiator, and a solvent including a base solvent and an auxiliary solvent, wherein the base solvent includes propylene glycol monomethyl ether acetate, and the auxiliary solvent includes dimethyl-2-methylglutarate and ethyl beta-ethoxypropionate, wherein in Chemical Formula 1, R1 to R9 are each independently a hydrogen atom or an alkyl group, “a” is an integer number from 0 through 10, “b” is an integer number from 0 through 100, and “c” is an integer number from 1 through 10.

Abstract translation: 一种光致抗蚀剂组合物，其包含粘合剂树脂，其包含由化学式1表示的酚醛清漆树脂，二叠氮基感光引发剂和包含碱溶剂和辅助溶剂的溶剂，其中所述基础溶剂包括丙二醇单甲醚乙酸酯，并且所述辅助溶剂包括 二甲基-2-甲基戊二酸酯和β-乙氧基丙酸乙酯，其中在化学式1中，R 1至R 9各自独立地为氢原子或烷基，“a”为0至10的整数，“b”为整数 从0到100，“c”是从1到10的整数。