公开(公告)号：US20220415932A1

公开(公告)日：2022-12-29

申请号：US17822751

申请日：2022-08-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sungwon CHO ,  Yu-Gwang JEONG ,  Daewon CHOI ,  Seon-Il KIM ,  Subin BAE ,  Yun Jong YEO

IPC: H01L27/12 ,  H01L29/786

Abstract: A display substrate includes a substrate, a first gate electrode on the substrate, a first gate insulating layer on the first gate electrode, an active layer on the first gate insulating layer, a second gate insulating layer on the active layer, a second gate electrode on the second gate insulating layer, an interlayer insulating layer on the second gate electrode, a first electrode on the interlayer insulating layer to contact a top surface, a side wall, and a bottom surface of the active layer via a first contact hole through the interlayer insulating layer, the second gate insulating layer, the active layer, and a portion of the first gate insulating layer, and a second electrode on the interlayer insulating layer to contact the first gate electrode via a second contact hole through the interlayer insulating layer, the second gate insulating layer, and the first gate insulating layer.

公开(公告)号：US20230162951A1

公开(公告)日：2023-05-25

申请号：US17992421

申请日：2022-11-22

Applicant: Samsung Display Co., Ltd. ,  WONIK IPS Co., Ltd.

Inventor： Daesoo KIM ,  Kyungbok KIM ,  Sanggab KIM ,  Juhee LEE ,  Daewon CHOI ,  Daeil KIM ,  Jaekeun KIM ,  Kwangjong YOO ,  Changnam CHOI ,  Hyunku PARK ,  Yunjong YEO

IPC: H01J37/32 ,  H01L27/12 ,  H10K71/00

CPC classification number: H01J37/32633 ,  H01J37/3244 ,  H01J37/32513 ,  H01J37/32522 ,  H01J37/32807 ,  H01L27/1259 ,  H01L51/56

Abstract: An apparatus and a method for manufacturing a display device are provided. The apparatus includes a plasma generator disposed outside a chamber, an adapter of the chamber, the adapter connecting the plasma generator to the chamber, a cooler connected to the adapter, an insulator connected to the cooler, and a diffuser connected to the insulator. A plasma generated by the plasma generator is supplied into the chamber through a flow path passing through the adapter, the cooler, the insulator, and the diffuser.

公开(公告)号：US20210111198A1

公开(公告)日：2021-04-15

申请号：US16896146

申请日：2020-06-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sungwon CHO ,  Yu-Gwang JEONG ,  Daewon CHOI ,  Seon-Il KIM ,  Subin BAE ,  Yun Jong YEO

IPC: H01L27/12 ,  H01L29/786

Abstract: A display substrate includes a substrate, a first gate electrode on the substrate, a first gate insulating layer on the first gate electrode, an active layer on the first gate insulating layer, a second gate insulating layer on the active layer, a second gate electrode on the second gate insulating layer, an interlayer insulating layer on the second gate electrode, a first electrode on the interlayer insulating layer to contact a top surface, a side wall, and a bottom surface of the active layer via a first contact hole through the interlayer insulating layer, the second gate insulating layer, the active layer, and a portion of the first gate insulating layer, and a second electrode on the interlayer insulating layer to contact the first gate electrode via a second contact hole through the interlayer insulating layer, the second gate insulating layer, and the first gate insulating layer.