公开(公告)号：US20190390342A1

公开(公告)日：2019-12-26

申请号：US16434256

申请日：2019-06-07

Applicant: SAMSUNG DISPLAY CO .. LTD.

Inventor： WOO JIN KIM ,  Dong Kyun KO ,  Keun Hee PARK ,  Myung Soo HUH ,  Seon Uk PARK

IPC: C23C16/455 ,  C23C16/50 ,  C23C16/40

Abstract: A thin film processing apparatus includes a susceptor and a showerhead facing the susceptor. The showerhead includes a first plate including an inner tunnel, a first injection hole, and a second injection hole. The inner tunnel extends across the first pate in a thickness direction of the first plate. The first injection hole penetrates a first surface and a second surface of the first plate on opposite sides of the first plate in the thickness direction, The second injection hole penetrates the second surface of the first plate. The second injection is connected with the inner tunnel.