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公开(公告)号:US20240013804A1
公开(公告)日:2024-01-11
申请号:US18348073
申请日:2023-07-06
发明人: Da Yao HE , Rong HUANG , Hua LI , Jian Hui HUANG , Peng LIU
CPC分类号: G11B5/3106 , G11B5/4826 , G11B2005/0021
摘要: The present disclosure discloses a device with a protective layer, including a substrate, a seed layer formed on the substrate, and a diamond-like carbon layer formed on the seed layer, where the seed layer is a silicon nitride layer, and a content of nitrogen in the silicon nitride layer is 9%-17%. The present disclosure further discloses a microwave-assisted magnetic recording (MAMR) head slider, a head gimbal assembly, and a disk drive unit. The device has good thermal stability, oxidation resistance and corrosion resistance, thereby improving reliability and prolonging service life of an MAMR head.