公开(公告)号：US20170155038A1

公开(公告)日：2017-06-01

申请号：US15334759

申请日：2016-10-26

Applicant: Sabic Global Technologies, B.V.

Inventor： Jesus Alfonso CARAVEO ,  Ibrahim AL-HOWAISH ,  Mahmoud N. ALMADHOUN ,  Abdulaziz Hamad M. ALDUBAYAN

IPC: H01L41/314 ,  H01L41/09 ,  H01L41/29

CPC classification number: H01L41/314 ,  B81C1/0015 ,  H01L27/20 ,  H01L41/094 ,  H01L41/1136 ,  H01L41/22 ,  H01L41/29 ,  H01L41/333

Abstract: A method of fabricating a microelectronic device comprising providing a substrate comprising a first bottom surface, providing a mold comprising a first top surface with first projections, and punching the first projections through the first bottom surface to define anchors, pre-cantilevers, and cavities in the substrate. A piezoelectric cantilever actuator system array prepared by a process comprising the steps of providing a substrate comprising a first bottom surface, providing a mold comprising a first top surface with first projections, and punching the first projections through the first bottom surface to define anchors, pre-cantilevers, and cavities in the substrate. A microelectronic device comprising a base, a first anchor coupled to the base, and a first cantilever coupled to the first anchor, wherein the base, the first anchor, and the first cantilever are an integral structure formed from the same substrate material.

公开(公告)号：US20180120938A1

公开(公告)日：2018-05-03

申请号：US15303855

申请日：2016-06-03

Applicant: SABIC GLOBAL TECHNOLOGIES B.V.

Inventor： Jesus Alfonso Caraveo FRESCAS ,  Ibrahim AL-HOWAISH ,  Mahmoud M. ALMADHOUN ,  Redha BELLA

IPC: G06F3/01 ,  G06F3/041 ,  H01L27/20 ,  H01L41/09 ,  H01L41/113

CPC classification number: G06F3/016 ,  G06F1/163 ,  G06F3/014 ,  G06F3/0414 ,  H01L27/20 ,  H01L41/094 ,  H01L41/1136

Abstract: User feedback may be generated and user input received through a single semiconductor component integrated into the electronic device. The single semiconductor component may include a piezoelectric cantilever actuator integrated with a transistor, such as a thin-film transistor, such that the actuator is electrically isolated from the transistor but mechanically attached to the transistor. One manner of integration is to extend a piezoelectric thin film of the actuator into a gate electrode stack of the transistor. The cantilever actuator may be controlled to provide haptic feedback. Separate from, and possibly simultaneously with the control of the cantilever actuator, user input may be received through the transistor integrated with the cantilever actuator.