公开(公告)号：US06507021B1

公开(公告)日：2003-01-14

申请号：US09713043

申请日：2000-11-15

Applicant: Ronald Lemuel Brood

Inventor： Ronald Lemuel Brood

IPC: G01J502

CPC classification number: G01J5/20

Abstract: A reference bolometer and the associated methods for fabricating a reference bolometer and for fabricating an array of bolometers are provided. The reference bolometer is fabricated such that a thermally conductive layer underlies the detector element, i.e., the absorber and transducer elements, and is encapsulated by a protective coating. The protective coating serves to prevent the thermally conductive layer underlying the detector element of the reference bolometer from being etched during the process of etching or otherwise removing other portions of the thermally conductive layer that underlie the detector elements of the imaging bolometers. As such, the thermally conductive layer of the reference bolometer maintains the desired thermal communication between the detector element and the substrate such that the output of the reference bolometer is unaffected by incident radiation. Methods for fabricating the reference bolometer are also provided that should increase the reliability and yield, thereby permitting manual inspection of the resulting focal plane array to be reduced.

Abstract translation: 提供了一个参考测辐射热谱仪和相关的制造参考测辐射热谱仪的方法和制作一组辐射热计量计。 制造参考测辐射热谱仪，使得导热层位于探测器元件即吸收体和换能器元件之下，并被保护涂层包封。 保护涂层用于防止在蚀刻过程中蚀刻或以其他方式去除位于成像辐射计的检测器元件之下的导热层的其它部分的基准测辐射热计的检测器元件下方的导热层。 因此，参考辐射热计的导热层在检测器元件和基板之间保持期望的热连通，使得参考辐射热计的输出不受入射辐射的影响。 还提供了制造参考测辐射热计的方法，其应该增加可靠性和产量，从而允许手动检查所得到的焦平面阵列以减少。