公开(公告)号：US06216091B1

公开(公告)日：2001-04-10

申请号：US09405864

申请日：1999-09-24

Applicant: Robert H. Hammond

Inventor： Robert H. Hammond

IPC: G01F166

CPC classification number: G01F1/667 ,  G01F1/668 ,  G01N2291/02836 ,  G01N2291/02881 ,  Y10T137/2541

Abstract: An ultrasonic measurement system performs a signal path measurement by directing ultrasonic signals through a gaseous material in a conduit, and processing the detected signals to determine sound speed and to derive the average molecular weight of an unknown hydrocarbon mixture present in the material. The processor includes a plurality of stored tables of critical constants of hydrocarbon mixtures as a function of the average molecular weight of the mixture, and is configured to iteratively set a hypothetical molecular weight, determine the corresponding critical properties, and compute a predicted sound speed. If the two speeds differ, a new weight is set and the procedure is repeated until the predicted sound speed matches the measured speed, indicating that the current estimate is the correct average molecular weight. Once the processor has determined the critical constants from its stored tables, it applies the virial equation of state and mixing rules to determine the predicted sound speed for each hypothetical molecular weight of an unknown mixture of hydrocarbons present, together with one or more known inorganic components, in the fluid material. The processor may be configured for user input of known quantities of one or more gases such as nitrogen, hydrogen, sulfur dioxide, carbon dioxide or other inorganic or non-hydrocarbon gases present in the conduit. Alternatively, all or some of this data may be provided in an automated manner from suitable signals, settings or measurements from upstream conduits, valves or measurement and control instrumentation.

Abstract translation: 超声波测量系统通过将超声波信号引导通过管道中的气态材料来执行信号路径测量，并处理检测到的信号以确定声速并导出材料中存在的未知烃混合物的平均分子量。 处理器包括作为混合物的平均分子量的函数的烃混合物的关键常数的多个存储的表，并且被配置为迭代地设置假设的分子量，确定相应的临界特性并计算预测的声速。 如果两个速度不同，则设定一个新的重量，并重复该过程，直到预测的声速匹配测量的速度，表明当前的估计是正确的平均分子量。 一旦处理器从其存储的表中确定关键常数，则它应用状态方程和混合规则，以确定存在的烃的未知混合物的每个假设分子量的预测声速，以及一种或多种已知的无机组分 ，在流体材料中。 处理器可以被配置为用户输入已知量的一种或多种气体，例如存在于管道中的氮气，氢气，二氧化硫，二氧化碳或其他无机或非烃气体。 或者，可以以适当的信号，来自上游管道，阀门或测量和控制仪器的设置或测量的方式以自动方式提供所有或部分数据。

公开(公告)号：US06190752B1

公开(公告)日：2001-02-20

申请号：US09191449

申请日：1998-11-12

Applicant: Khiem B. Do ,  Pin-Chin Connie Wang ,  Robert H. Hammond ,  Theodore H. Geballe

Inventor： Khiem B. Do ,  Pin-Chin Connie Wang ,  Robert H. Hammond ,  Theodore H. Geballe

IPC: B32B310

CPC classification number: H01L39/2461 ,  C23C14/024 ,  C30B23/02 ,  C30B29/16 ,  Y10T428/24355 ,  Y10T428/32

Abstract: A thin film of material having a rock-salt-like structure is deposited on a smooth amorphous substrate surface by ion beam assisted deposition.

Abstract translation: 具有岩盐状结构的材料薄膜通过离子束辅助沉积沉积在光滑的非晶衬底表面上。

公开(公告)号：US06899928B1

公开(公告)日：2005-05-31

申请号：US10208086

申请日：2002-07-29

Applicant: James R. Groves ,  Paul N. Arendt ,  Robert H. Hammond

Inventor： James R. Groves ,  Paul N. Arendt ,  Robert H. Hammond

IPC: C30B23/02 ,  C30B29/16 ,  C23C14/18 ,  C23C14/24 ,  C23C14/48 ,  C30B28/14

CPC classification number: C30B23/02 ,  C30B29/16

Abstract: The present invention is directed towards a process and apparatus for epitaxial deposition of a material, e.g., a layer of MgO, onto a substrate such as a flexible metal substrate, using dual ion beams for the ion beam assisted deposition whereby thick layers can be deposited without degradation of the desired properties by the material. The ability to deposit thicker layers without loss of properties provides a significantly broader deposition window for the process.

Abstract translation: 本发明涉及一种用于将材料（例如，一层MgO）外延沉积到诸如柔性金属基底的基底上的方法和装置，其使用用于离子束辅助沉积的双离子束，由此可以沉积厚层 而不会由材料降解所需的性能。 沉积较厚层而不损失性能的能力为该工艺提供了一个显着更广泛的沉积窗口。

公开(公告)号：US4719120A

公开(公告)日：1988-01-12

申请号：US913793

申请日：1986-09-29

Applicant: Arold K. Green ,  Robert H. Hammond

Inventor： Arold K. Green ,  Robert H. Hammond

IPC: C23C14/52 ,  G01N23/22 ,  B05D5/12

CPC classification number: C23C14/52 ,  G01N23/2202

Abstract: A method for determining the presence, during deposition of a first thin m layer, of a substance which escapes when the layer is cooled and transferred from its deposition environment for analysis to determine the presence of the substance. The layer is first covered with a second layer of a material which captures the escaping substance. This second layer is then covered with a cap layer of a substance which seals the second layer against contamination, as from the atmosphere during transfer. The layered structure, with the escaped substance retained in the second layer, is then analyzed, as by sputter depth profiling and Auger electron spectroscopy, to determine the presence in the second layer of the escaped substance and thus determine the presence of this substance during deposition of the first layer.

Abstract translation: 一种用于确定在沉积第一薄膜层期间存在当该层被冷却并从其沉积环境转移以确定物质的存在时逸出的物质的存在的方法。 该层首先用覆盖逸出物质的第二层材料覆盖。 然后，该第二层被覆盖有物质的盖层，所述物质的密封层与传递期间的大气密封第二层以防污染。 然后通过溅射深度分布和俄歇电子能谱法分析保留在第二层中的逃逸物质的分层结构，以确定在逸出物质的第二层中的存在，从而确定沉积期间该物质的存在 的第一层。

公开(公告)号：US06557393B1

公开(公告)日：2003-05-06

申请号：US09721376

申请日：2000-11-22

Applicant: Yuzef Gokhfeld ,  Robert H. Hammond ,  Yu Shen ,  Gary Parece

Inventor： Yuzef Gokhfeld ,  Robert H. Hammond ,  Yu Shen ,  Gary Parece

IPC: G01N2730

CPC classification number: G01N27/4075 ,  G01N27/304 ,  G01N27/4071

Abstract: An oxygen sensor has a sensor body formed of a crystalline material, such as zirconia, with first and second electrodes disposed on a single surface thereof. The electrodes are arranged to induce superionic oxygen transport in the body along current paths extending at a shallow depth in the crystalline material at the electrode surface. The electrodes may be interdigitated or juxtaposed porous electrodes that define an exposed surface pattern of ionic conduction for sensing, and the electrodes are preferably poisoned to inhibit cross sensitivity to reactive components, such as hydrogen, that may be present in the environment. The electrodes may effect electrode-limited superionic conduction in a thin slice of single crystal material, or a polycrystalline yttria-stabilized zirconia film sensing body, and operate at a relatively low temperature in the range of 250-400° C., preferably about 300-350° C., with negligible leakage current or cross sensitivity, allowing reliable measurement of oxygen concentrations in the ppb range. The oxygen sensor may be fabricated together with a heater, such as a resistive heating element, deposited on the back face of the sensor body, or the sensor body may be attached to a heater chip. One such heater chip includes both a heating electrode, and a resistive thermal device that may, for example, provide a feedback or control signal for controlling heater temperature in the desired range. The sensors may be lithographically formed in arrays with suitable lead pads, then scored and separated, and mounted on heater chips, providing a self-contained integrated unit of versatile application.

Abstract translation: 氧传感器具有由诸如氧化锆的结晶材料形成的传感器主体，其中第一和第二电极设置在其单个表面上。 电极被布置成在电极表面的结晶材料的浅深度处延伸的电流路径在体内诱导超离子氧输送。 电极可以是指叉或多个并置的多孔电极，其限定用于感测的离子传导的暴露表面图案，并且电极优选被中毒以抑制可能存在于环境中的反应性组分（例如氢）的交叉敏感性。 电极可以在薄晶片单晶材料或多晶氧化钇稳定的氧化锆薄膜感测体中实现电极限制超导导通，并且在250-400℃的范围内的较低温度下操作，优选约300 -350°C，泄漏电流或交叉灵敏度可忽略不计，允许可靠地测量ppb范围内的氧浓度。 氧传感器可以与沉积在传感器主体的背面上的加热器（例如电阻加热元件）一起制造，或者传感器主体可以附接到加热器芯片。 一个这样的加热器芯片包括加热电极和电阻热装置，其可以例如提供用于将加热器温度控制在期望范围内的反馈或控制信号。 传感器可以光刻地形成阵列，并具有合适的引线板，然后刻划和分离，并安装在加热器芯片上，提供了一个独立的集成单元，具有多功能应用。

公开(公告)号：US5530541A

公开(公告)日：1996-06-25

申请号：US396215

申请日：1995-02-28

Applicant: Charles H. Ahn ,  Malcolm R. Beasley ,  Steven J. Benerofe ,  Martin M. Fejer ,  Robert H. Hammond ,  Weizhi Wang

Inventor： Charles H. Ahn ,  Malcolm R. Beasley ,  Steven J. Benerofe ,  Martin M. Fejer ,  Robert H. Hammond ,  Weizhi Wang

IPC: G01J3/433 ,  G01N21/31 ,  G01N21/39

CPC classification number: G01N21/3103 ,  G01J3/4338

Abstract: An atomic absorption apparatus using a laser for producing a light beam having a characteristic frequency f, typically ranging from several MHz to several GHz, and a characteristic polarization for measuring the absorption of that light beam by atoms of interest. The apparatus has a modulator to generate a modulating signal to modulate the characteristic frequency f and produce a phase-modulated light beam. The apparatus includes a domain where the specific atoms are located. This domain is positioned in the path of the phase-modulated light beam such that the phase-modulated light beam encounters the specific atoms when passing through the domain and some of the specific atoms absorb a portion of the phase-modulated light beam. Typically, the domains containing the atoms of interest include process chambers for vacuum coating, ion milling, sputtering, mass spectroscopy vapor coating or deposition, and the like. The amount of light absorbed depends on the motion of the atoms relative to the phase-modulated light beam.

Abstract translation: 一种使用激光产生具有特征频率f（通常为几MHz至几GHz）的光束的原子吸收装置，以及用于测量该光束被感兴趣原子吸收的特征极化。 该装置具有调制器以产生调制信号以调制特征频率f并产生相位调制光束。 该装置包括特定原子所在的区域。 该域位于相位调制光束的路径中，使得相位调制光束在通过畴时遇到特定原子，并且一些特定原子吸收相位调制光束的一部分。 通常，包含感兴趣原子的结构域包括用于真空涂覆，离子研磨，溅射，质谱法蒸镀或沉积的处理室。 吸收的光量取决于原子相对于相位调制光束的运动。

公开(公告)号：US06463808B1

公开(公告)日：2002-10-15

申请号：US09412236

申请日：1999-10-04

Applicant: Robert H. Hammond

Inventor： Robert H. Hammond

IPC: G01F166

CPC classification number: G01F1/667

Abstract: Flow is described by first variables related to a coordinate system, and by at least one second flow-related variable such as friction factor or Reynolds number unrelated to the coordinate system, wherein the first variables are separable or substantially separable from the second variables. The method includes determining average velocities of the fluid on two paths, or taking a first path measurement and at least one point measurement, selected such that combining the first path measurement and the second measurement forms an expression independent of the second variable. In one embodiment, first and second path measurements are combined in accordance with the velocity relationships given by the Pao equation to produce a flow measurement which is independent of the friction factor. A single calibration then allows the meter to be used on diverse conduits with different wall roughness or friction factor. The system also yields a non-invasive measure of the friction factor. A conventional flow meter may be set up by solving for flow profile and analytically determining a meter factor or appropriate measurement path. The measurements may be combined to eliminate the second variable, or to determine a chord on which the measured velocity equals the mean flow velocity across the conduit cross-sectional area. Alternatively, the two transit times may combined to determine a meter factor, or a known flow profile may be used to determine a single chord along which the transit time measurements relate to flow in a manner independent of the second variable.

Abstract translation: 流量由与坐标系相关的第一变量以及与坐标系无关的至少一个第二流相关变量（例如摩擦系数或雷诺数）描述，其中第一变量是可分离的或基本上可与第二变量分离。 该方法包括确定两个路径上的流体的平均速度，或者进行第一路径测量和至少一个点测量，使得组合第一路径测量和第二测量形成独立于第二变量的表达式。 在一个实施例中，根据由Pao方程给出的速度关系来组合第一和第二路径测量以产生独立于摩擦系数的流量测量。 单次校准然后允许仪表用于具有不同壁面粗糙度或摩擦系数的不同导管。 该系统还产生摩擦系数的非侵入性测量。 常规的流量计可以通过求解流量分布和分析确定仪表系数或适当的测量路径来建立。 可以组合测量以消除第二变量，或者确定所测量的速度等于穿过管道横截面积的平均流速的弦。 或者，两个运输时间可以组合以确定仪表系数，或者可以使用已知的流量分布来确定单个和弦，沿着该弦和通过时间测量以独立于第二变量的方式与流动相关联。

公开(公告)号：US5047385A

公开(公告)日：1991-09-10

申请号：US221726

申请日：1988-07-20

Applicant: Malcolm R. Beasley ,  Kookrin Char ,  Theodore H. Geballe ,  Robert H. Hammond ,  Aharon Kapitulnik ,  Andy Kent ,  Michio Naito ,  Byungdu Oh

Inventor： Malcolm R. Beasley ,  Kookrin Char ,  Theodore H. Geballe ,  Robert H. Hammond ,  Aharon Kapitulnik ,  Andy Kent ,  Michio Naito ,  Byungdu Oh

IPC: C23C14/08 ,  C30B23/02 ,  H01L39/24

CPC classification number: H01L39/2435 ,  C23C14/087 ,  C30B23/002 ,  C30B23/02 ,  C30B29/22 ,  C30B29/225 ,  Y10S505/73 ,  Y10S505/731 ,  Y10S505/742

Abstract: A method of forming a superconducting YBa.sub.2 Cu.sub.3 O.sub.7-x thin film with selected crystal orientation is described which comprises the steps of sputtering simultaneously Y, Ba and Cu onto the surface of a substrate, introducing oxygen at said surface during deposition, controlling the stoichiometry of the elements Y, Ba or both richer or poorer than the 1:2:3 stoichiometry within a few atom percent and followed by annealing to selectively grow an a-axis or a c-axis oriented film of YBa.sub.2 Cu.sub.3 O.sub.7-x.

Abstract translation: 描述了形成具有选定晶体取向的超导YBa2Cu3O7-x薄膜的方法，其包括以下步骤：将Y，Ba和Cu同时溅射到衬底的表面上，在沉积期间在所述表面引入氧，控制元素的化学计量 Y，Ba或比在1原子百分比内的1:2:3化学计量比较富或较差，然后进行退火以选择性地生长YBa2Cu3O7-x的a轴或c轴取向薄膜。