公开(公告)号：US20180233590A1

公开(公告)日：2018-08-16

申请号：US15923787

申请日：2018-03-16

申请人： Renesas Electronics Corporation

发明人： Takashi Inoue ,  Tatsuo Nakayama ,  Yuji Ando ,  Yasuhiro Murase ,  Kazuki Ota ,  Hironobu Miyamoto ,  Katsumi Yamanoguchi ,  Naotaka Kuroda ,  Akio Wakejima ,  Yasuhiro Okamoto

IPC分类号： H01L29/778 ,  H01L29/423 ,  H01L29/20 ,  H01L29/06 ,  H01L29/15 ,  H01L29/205

CPC分类号： H01L29/7783 ,  H01L29/0607 ,  H01L29/155 ,  H01L29/2003 ,  H01L29/205 ,  H01L29/42316 ,  H01L29/7787

摘要： In a group III nitride-type field effect transistor, the present invention reduces a leak current component by conduction of residual carriers in a buffer layer, and achieves improvement in a break-down voltage, and enhances a carrier confinement effect (carrier confinement) of a channel to improve pinch-off characteristics (to suppress a short channel effect). For example, when applying the present invention to a GaN-type field effect transistor, besides GaN of a channel layer, a composition-modulated (composition-gradient) AlGaN layer in which aluminum composition reduces toward a top gradually or stepwise is used as a buffer layer (hetero buffer). To gate length Lg of a FET to be prepared, a sum a of layer thicknesses of an electron supply layer and a channel layer is selected so as to fulfill Lg/a≥5, and in such a case, the layer thickness of the channel layer is selected in a range of not exceeding 5 times (about 500 Å) as long as a de Broglie wavelength of two-dimensional electron gas accumulated in the channel layer in room temperature.

公开(公告)号：US09954087B2

公开(公告)日：2018-04-24

申请号：US14470403

申请日：2014-08-27

申请人： Renesas Electronics Corporation

发明人： Takashi Inoue ,  Tatsuo Nakayama ,  Yuji Ando ,  Yasuhiro Murase ,  Kazuki Ota ,  Hironobu Miyamoto ,  Katsumi Yamanoguchi ,  Naotaka Kuroda ,  Akio Wakejima ,  Yasuhiro Okamoto

IPC分类号： H01L29/06 ,  H01L29/778 ,  H01L29/15 ,  H01L29/20 ,  H01L29/423 ,  H01L29/205

CPC分类号： H01L29/7783 ,  H01L29/0607 ,  H01L29/155 ,  H01L29/2003 ,  H01L29/205 ,  H01L29/42316 ,  H01L29/7787

摘要： In a group III nitride-type field effect transistor, the present invention reduces a leak current component by conduction of residual carriers in a buffer layer, and achieves improvement in a break-down voltage, and enhances a carrier confinement effect (carrier confinement) of a channel to improve pinch-off characteristics (to suppress a short channel effect). For example, when applying the present invention to a GaN-type field effect transistor, besides GaN of a channel layer, a composition-modulated (composition-gradient) AlGaN layer in which aluminum composition reduces toward a top gradually or stepwise is used as a buffer layer (hetero buffer). To gate length Lg of a FET to be prepared, a sum a of layer thicknesses of an electron supply layer and a channel layer is selected so as to fulfill Lg/a≥5, and in such a case, the layer thickness of the channel layer is selected in a range of not exceeding 5 times (about 500 Å) as long as a de Broglie wavelength of two-dimensional electron gas accumulated in the channel layer in room temperature.

公开(公告)号：US20140367743A1

公开(公告)日：2014-12-18

申请号：US14470403

申请日：2014-08-27

申请人： Renesas Electronics Corporation

发明人： Takashi Inoue ,  Tatsuo Nakayama ,  Yuji Ando ,  Yasuhiro Murase ,  Kazuki Ota ,  Hironobu Miyamoto ,  Katsumi Yamanoguchi ,  Naotaka Kuroda ,  Akio Wakejima ,  Yasuhiro Okamoto

IPC分类号： H01L29/778 ,  H01L29/205 ,  H01L29/06 ,  H01L29/20

CPC分类号： H01L29/7783 ,  H01L29/0607 ,  H01L29/155 ,  H01L29/2003 ,  H01L29/205 ,  H01L29/42316 ,  H01L29/7787

摘要： In a group III nitride-type field effect transistor, the present invention reduces a leak current component by conduction of residual carriers in a buffer layer, and achieves improvement in a break-down voltage, and enhances a carrier confinement effect (carrier confinement) of a channel to improve pinch-off characteristics (to suppress a short channel effect). For example, when applying the present invention to a GaN-type field effect transistor, besides GaN of a channel layer, a composition-modulated (composition-gradient) AlGaN layer in which aluminum composition reduces toward a top gradually or stepwise is used as a buffer layer (hetero buffer). To gate length Lg of a FET to be prepared, a sum a of layer thicknesses of an electron supply layer and a channel layer is selected so as to fulfill Lg/a≧5, and in such a case, the layer thickness of the channel layer is selected in a range of not exceeding 5 times (about 500 Å) as long as a de Broglie wavelength of two-dimensional electron gas accumulated in the channel layer in room temperature.

摘要翻译： 在III族氮化物型场效应晶体管中，本发明通过缓冲层中的残留载流子的传导来减少漏电流成分，并且可以实现击穿电压的提高，并且提高了载流子限制效应（载流子限制） 提高夹断特性的通道（抑制短路效应）。 例如，当将本发明应用于GaN型场效应晶体管时，除了沟道层的GaN之外，使用其中铝组成逐渐或逐步朝向顶部的组分调制（组成梯度）AlGaN层用作 缓冲层（杂质缓冲液）。 对于要制备的FET的栅极长度Lg，选择电子供给层和沟道层的层厚度的和a以满足Lg /a≥5，并且在这种情况下，沟道的层厚度 只要在室温下积聚在通道层中的二维电子气的德布罗意波长，不超过5倍（约500）的范围内选择层。