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公开(公告)号:US20240426589A1
公开(公告)日:2024-12-26
申请号:US18826243
申请日:2024-09-06
Inventor: TOSHIO SHIBUTANI , KAZUMI KOBAYASHI , TAKANORI FUNABASHI , KEISHI KUBO
Abstract: A storage device stores a measurement probe used in a profilometer. The measurement probe includes an air bearing configured such that a stylus to be brought into contact with a measurement object is movable. The storage device includes a storage mechanism for storing the measurement probe, and an air supply mechanism configured to continuously supply air to the air bearing when the measurement probe is stored in the storage mechanism.