公开(公告)号：US12112896B2

公开(公告)日：2024-10-08

申请号：US17426039

申请日：2020-02-19

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Naomi Kurihara ,  Akihiro Yamaguchi ,  Mitsuhisa Yoshimura ,  Miwa Ogawa

IPC: C23C16/40 ,  C23C16/02 ,  H01G9/00 ,  H01G13/00 ,  H01G9/055

CPC classification number: H01G9/0032 ,  C23C16/0209 ,  C23C16/40 ,  H01G13/006 ,  H01G9/055

Abstract: A film production method for producing a layer containing a metal oxide, the film production method including: a heating step of heating a metal foil containing a first metal by bringing a part of the metal foil into contact with at least one heat generator; a first contact step of letting first gas containing a second metal to be in contact with both surfaces of the metal foil in a state where the part of the metal foil is supported; and a second contact step of letting second gas containing an oxidant to be in contact with the both surfaces of the metal foil in a state where the part of the metal foil is supported.