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公开(公告)号：US11126096B2
公开(公告)日：2021-09-21
申请号：US16650359
申请日：2018-09-28
发明人： Elvino Da Silveira , Keith Frank Best , Wayne Fitzgerald , Jian Lu , Xin Song , J. Casey Donaher , Christopher J. McLaughlin
摘要： A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.
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公开(公告)号：US11531279B2
公开(公告)日：2022-12-20
申请号：US17407678
申请日：2021-08-20
发明人： Elvino da Silveira , Keith F. Best , Wayne Fitzgerald , Jian Lu , Xin Song , J. Casey Donaher , Christopher J. McLaughlin
摘要： A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.
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公开(公告)号：US20220075282A1
公开(公告)日：2022-03-10
申请号：US17407678
申请日：2021-08-20
发明人： Elvino da Silveira , Keith F. Best , Wayne Fitzgerald , Jian Lu , Xin Song , J. Casey Donaher , Christopher J. McLaughlin
摘要： A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.
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