公开(公告)号：US10600608B1

公开(公告)日：2020-03-24

申请号：US16353475

申请日：2019-03-14

Applicant: Nissin Ion Equipment Co., Ltd.

Inventor： Masakazu Adachi ,  Shigeki Sakai ,  Yuya Hirai ,  Takayuki Murayama ,  Tomoya Taniguchi ,  Weijiang Zhao

IPC: H01J7/24 ,  H05B31/26 ,  H01J27/02

Abstract: An ion source is provided. The ion source includes a plasma generation chamber, a plate member, and an extraction electrode. The plasma generation chamber is supplied with a halogen-containing material. The plate member is provided on an end of the plasma generation chamber located on a side toward which an ion beam is extracted. The extraction electrode is disposed downstream of the plate member. The plate member is formed with a gas supply passage via which hydrogen gas is supplied to the extraction electrode.

公开(公告)号：US10002751B2

公开(公告)日：2018-06-19

申请号：US15337016

申请日：2016-10-28

Applicant: NISSIN ION EQUIPMENT CO., LTD.

Inventor： Naoya Takahashi ,  Hideki Fujita ,  Yosuke Yoshimura ,  Shigeki Sakai

IPC: H01J37/30 ,  H01J49/42 ,  H01J49/06 ,  H01J37/317

CPC classification number: H01J49/421 ,  H01J37/3171 ,  H01J49/065 ,  H01J49/30 ,  H01J49/463

Abstract: An ion beam irradiation apparatus is provided. The apparatus includes an ion source, a mass separator, and an energy filter. The mass separator sorts dopant ions having a specific mass number and valence from an ion beam extracted from the ion source, and outputs the dopant ions. The energy filter is formed to define a beam passing region for allowing the ion beam to pass therethrough, and configured to have a given filter potential in response to application of a voltage thereto to separate passable ions capable of passing through the beam passing region and non-passable ions incapable of passing through the beam passing region, from each other by a difference in ion energy. The given filter potential is set such that the dopant ions are included in the passable ions, and a portion of unwanted ions which cannot be separated from the dopant ions by the mass separator are included in the non-passable ions.