公开(公告)号：US07532317B2

公开(公告)日：2009-05-12

申请号：US11319677

申请日：2005-12-28

Applicant: Nigel Smith ,  Yi-sha Ku ,  Shih Chun Wang ,  Chun-hung Ko

Inventor： Nigel Smith ,  Yi-sha Ku ,  Shih Chun Wang ,  Chun-hung Ko

IPC: G01B15/08

CPC classification number: G01N21/4788 ,  G01B11/24 ,  G03F7/70491 ,  G03F7/70616 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A system and method for efficiently and accurately determining grating profiles uses characteristic signature matching in a discrepancy enhanced library generation process. Using light scattering theory, a series of scattering signatures vs. scattering angles or wavelengths are generated based on the designed grating parameters, for example. CD, thickness and Line:Space ratio. This method selects characteristic portions of the signatures wherever their discrepancy exceeds the preset criteria and reforms a characteristic signature library for quick and accurate matching. A rigorous coupled wave theory can be used to generate a diffraction library including a plurality of simulated diffraction spectrums based on a predetermined structural parameter of the grating. The characteristic region of the plurality of simulated diffraction spectrums is determined based on if the root mean square error of the plurality of simulated diffraction spectrums is larger than a noise level of a measuring machine. The diffraction intensity of the measured diffraction spectrum is compared with that of the plurality of simulated diffraction spectrums in the characteristic region to select a match spectrum from these simulated diffraction spectrums, and the structural parameter of the grating is decided based on the match spectrum.

Abstract translation: 用于有效和准确地确定光栅轮廓的系统和方法使用差异增强型图书馆生成过程中的特征签名匹配。 使用光散射理论，例如，基于设计的光栅参数产生一系列散射特征与散射角或波长。 CD，厚度和线：空间比。 该方法选择签名的特征部分，无论其差异超过预设标准，并对特征签名库进行改进以进行快速准确的匹配。 可以使用严格的耦合波理论来产生包括基于光栅的预定结构参数的多个模拟衍射光谱的衍射库。 基于多个模拟衍射光谱的均方根误差是否大于测量机的噪声水平来确定多个模拟衍射光谱的特征区域。 将测量的衍射光谱的衍射强度与特征区域中的多个模拟衍射光谱的衍射强度进行比较，从这些模拟衍射光谱中选择匹配光谱，并根据匹配光谱确定光栅的结构参数。

公开(公告)号：US20080013176A1

公开(公告)日：2008-01-17

申请号：US11774402

申请日：2007-07-06

Applicant: Shih Chun Wang ,  Yi Sha Ku ,  Chun Hung Ko ,  Deh Ming Shyu ,  Nigel Smith

Inventor： Shih Chun Wang ,  Yi Sha Ku ,  Chun Hung Ko ,  Deh Ming Shyu ,  Nigel Smith

IPC: G02B5/18

CPC classification number: G02B5/18 ,  G02B27/0012 ,  Y10S359/90

Abstract: A method for designing a grating comprises steps of (a1) generating a first diffraction spectrum based on calculation values of a plurality of structural parameters, (a2) calculating a first difference value between the first diffraction spectrum and a first nominal spectrum, (a3) setting a default difference value with the first difference value and default structural parameter values with the structural parameter values, (b1) changing one of the structural parameter values to generate a second diffraction spectrum, (b2) calculating a second difference value between the second diffraction spectrum and a second nominal spectrum, and (c) comparing the default difference value and the second difference value, updating a default difference value with the smaller one, and updating the default structural parameter values with the structural parameter values corresponding to the smaller one.

Abstract translation: 一种光栅设计方法，包括以下步骤：（a1）基于多个结构参数的计算值产生第一衍射光谱，（a2）计算第一衍射光谱和第一标称光谱之间的第一差值，（a3） 设置具有所述结构参数值的所述第一差值和默认结构参数值的默认差值，（b1）改变所述结构参数值之一以产生第二衍射谱，（b2）计算所述第二衍射 频谱和第二标称频谱，以及（c）比较默认差值和第二差值，更新较小值的默认差值，并用对应于较小值的结构参数值更新默认结构参数值。

公开(公告)号：US07800824B2

公开(公告)日：2010-09-21

申请号：US11774402

申请日：2007-07-06

Applicant: Shih Chun Wang ,  Yi Sha Ku ,  Chun Hung Ko ,  Deh Ming Shyu ,  Nigel Smith

Inventor： Shih Chun Wang ,  Yi Sha Ku ,  Chun Hung Ko ,  Deh Ming Shyu ,  Nigel Smith

IPC: G02B5/18 ,  G02B27/44

CPC classification number: G02B5/18 ,  G02B27/0012 ,  Y10S359/90

Abstract: A method for designing a grating comprises steps of (a1) generating a first diffraction spectrum based on calculation values of a plurality of structural parameters, (a2) calculating a first difference value between the first diffraction spectrum and a first nominal spectrum, (a3) setting a default difference value with the first difference value and default structural parameter values with the structural parameter values, (b1) changing one of the structural parameter values to generate a second diffraction spectrum, (b2) calculating a second difference value between the second diffraction spectrum and a second nominal spectrum, and (c) comparing the default difference value and the second difference value, updating a default difference value with the smaller one, and updating the default structural parameter values with the structural parameter values corresponding to the smaller one.

Abstract translation: 一种光栅设计方法，包括以下步骤：（a1）基于多个结构参数的计算值产生第一衍射光谱，（a2）计算第一衍射光谱和第一标称光谱之间的第一差值，（a3） 设置具有所述结构参数值的所述第一差值和默认结构参数值的默认差值，（b1）改变所述结构参数值之一以产生第二衍射谱，（b2）计算所述第二衍射 频谱和第二标称频谱，以及（c）比较默认差值和第二差值，更新较小值的默认差值，并用对应于较小值的结构参数值更新默认结构参数值。

公开(公告)号：US20070259312A1

公开(公告)日：2007-11-08

申请号：US11740676

申请日：2007-04-26

Applicant: Shih Chun Wang

Inventor： Shih Chun Wang

IPC: A61C1/05

CPC classification number: A61C1/05

Abstract: A turbine for dental burr handpiece includes a turbine main body having an axial central bore with a pivot shaft fixedly connected thereto, and multiple circles of blade sets surrounding the main body. The blades on two adjacent blade sets are staggered in arrangement. For guiding air, each blade in each of the blade sets is provided at a radially inner end adjacent to a radially outer end of a preceding blade with an air guiding slot, and two axially outmost blade sets are provided between respective axial outer side and a corresponding outer end of the central bore with an annular recess. High-pressure air introduced into the dental burr handpiece sequentially strikes against the blades on the multiple circles of blade sets to thereby quickly, smoothly, and stably rotate the pivot shaft at high speed without causing high wind resistance and turbulence, or noise due to vibration.

Abstract translation: 用于牙科毛刺手柄的涡轮机包括具有轴向中心孔的涡轮机主体，枢轴与其固定连接，以及围绕主体的多个叶片组。 两个相邻叶片组上的叶片交错排列。 为了引导空气，每个叶片组中的每个叶片设置在与前一叶片的径向外端相邻的径向内端处，具有空气引导槽，并且两个轴向最外侧的叶片组设置在相应的轴向外侧和 中心孔的对应外端具有环形凹部。 引入到牙齿毛刺手机中的高压空气依次冲击叶片组的多个圆周上的叶片，从而快速平稳地稳定地转动枢轴，而不会产生高风阻和湍流，或由于振动引起的噪音 。