Inspection jig and inspection device

    公开(公告)号:US12158480B2

    公开(公告)日:2024-12-03

    申请号:US17917950

    申请日:2021-04-19

    Abstract: An inspection jig includes a rod-shaped probe, a first support portion that supports one end portion side of the probe, a second support portion that supports the other end portion side of the probe, and a separation holding member that holds the first support portion and the second support portion to be separated from each other. The first support portion includes a support plate in which a through hole through which the probe is inserted is formed. A reinforcing plate having bending strength stronger than that of the support plate is disposed on a surface of the support plate facing the second support portion.

    Inspection jig provided with probe, substrate inspection device provided with same, and method for manufacturing inspection jig

    公开(公告)号:US10914758B2

    公开(公告)日:2021-02-09

    申请号:US16319827

    申请日:2017-07-20

    Abstract: This inspection jig is provided with: an inspection-side support member having a counter plate (51) provided with a facing surface (F) disposed to face the substrate; and an electrode-side support member (6) having supporting plates (61-63) disposed to face an electrode plate (9) located on the side opposite to the facing surface (F) of the counter plate (51) A probe supporting hole (23), into and by which the rear end portion of the probe (Pr) is inserted and supported, is provided in the supporting plates (61-63), and the probe supporting hole (23) is provided with a restricting surface which is formed along a supporting line (V) inclined at a certain angle (θ) with respect to a reference line (Z), and which restricts the rear end portion of the probe (Pr) from moving in the direction perpendicular to the inclined direction of the supporting line (V).

    Probe, inspection jig, inspection device, and method for manufacturing probe

    公开(公告)号:US11454650B2

    公开(公告)日:2022-09-27

    申请号:US17043770

    申请日:2019-05-27

    Abstract: A probe has a substantially bar shape, and includes a tip end, a base end, and a body portion that is located between the tip end and the base end and has a thickness in a thickness direction orthogonal to an axial direction of the substantially bar shape thinner than the tip end. The body portion includes a slope surface that is continuous with the tip end and is inclined with respect to the axial direction in a direction in which the thickness becomes gradually thinner with increasing distance from the tip end. A first region having a surface shape that bulges outward is provided in at least a part of the slope surface.

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