公开(公告)号：US20220172919A1

公开(公告)日：2022-06-02

申请号：US17651278

申请日：2022-02-16

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Kazuhiro KISHI ,  Munehiro OGASAWARA

IPC: H01J37/04 ,  H01J37/317

Abstract: A blanking deflector according to an embodiment includes: a first electrode comprising a first insulator, a first material film coating all surfaces of the first insulator and having lower resistance than the first insulator, and a first low-resistance film coating part or all of surfaces of the first material film and having lower resistance than the first material film; and a second electrode comprising a second insulator, a second material film coating all surfaces of the second insulator and having lower resistance than the second insulator, and a second low-resistance film coating part or all of surfaces of the second material film and having lower resistance than the second material film, wherein the blanking deflector controls whether to irradiate a specimen with a charged particle beam by causing the charged particle beam to pass between the first electrode and the second electrode.