公开(公告)号：US20230391676A1

公开(公告)日：2023-12-07

申请号：US18266216

申请日：2021-12-08

Applicant: NIPPON YTTRIUM CO., LTD.

Inventor： Kento MATSUKURA ,  Yoshiaki TAZAKI ,  Minami DAN

IPC: C04B35/505 ,  C04B35/645 ,  H01J37/32

CPC classification number: C04B35/505 ,  C04B35/645 ,  H01J37/32495 ,  C04B2235/3222 ,  C04B2235/5436 ,  C04B2235/5409 ,  C04B2235/656 ,  C04B2235/604 ,  C04B2235/666 ,  C04B2235/77 ,  C04B2235/786 ,  H01J2237/0203

Abstract: A sintered body contains perovskite YAlO3 (YAP) as a main phase exhibited in X-ray diffractometry, and has a Vickers hardness of 11 GPa or more. In the case where the sintered body contains a composition other than YAlO3, the composition preferably substantially consists of Y3Al5O12 and Y4Al2O9. The sintered body preferably has an absolute density of 5.1 g/cm3 or more. The sintered body preferably has an open porosity of 1% or less, and also preferably has an average crystal grain size of 10 μm or less.