公开(公告)号：US20250065406A1

公开(公告)日：2025-02-27

申请号：US18718970

申请日：2023-01-20

Applicant: NIKON SLM SOLUTIONS AG

Inventor： Philipp Rohse

IPC: B22F10/31 ,  B22F10/28 ,  B22F12/45 ,  B22F12/49 ,  B22F12/90

Abstract: A method for calibrating an irradiation system (10) for use in an apparatus (100) for producing a three-dimensional work piece is described. The method comprising the step of i) setting a distance between a calibration plane (30) and an optical unit (16) of the irradiation system (10) in a z-direction perpendicular to the calibration plane (30) to a first distance (z1). In a step ii), while maintaining the distance between the calibration plane (30) and the optical unit (16) at the first distance (z1), a first calibration pattern (p1,1) is irradiated in a first x-y region (a1) within the calibration plane (30) with a scanner mirror (22) of the optical unit (16) being arranged in a first angular basic position. A second calibration pattern (p2,1) is irradiated in a second x-y region within the calibration plane (30) with the scanner mirror (22) of the optical unit (16) being arranged at a second angular basic position in which the scanner mirror (22) is pivoted relative to the first angular basic position by at least ±1°. In a step iii) the distance between the calibration plane (30) and the optical unit (16) in the z-direction is set to a second distance (z2) different from the first distance (z1). In a step iv), while maintaining the distance between the calibration plane (30) and the optical unit (16) at the second distance (22), a third calibration pattern (p1,2) is irradiated in the first x-y region (a1) with the scanner mirror (22) of the optical unit (16) being arranged in the first angular basic position, and a fourth calibration pattern (p2,2) is irradiated in the second x-y region (a2) with the scanner mirror (22) of the optical unit (16) being arranged in the second angular basic position. In a step v) the first, the second, the third and the fourth calibration pattern (p1,1, p2,1, p1,2, p2,2) are evaluated so as to determine focus positions of the radiation beam (14) in the z-direction in dependence on an x-y position within the calibration plane (30). In a step vi) the irradiation system (10) is calibrated based on the determined focus positions of the radiation beam (14).