专利检索 ap:("NIKON CORPORATION" OR "NIKON METROLOGY NV") AND inv:"Daisuke Kitazawa" 第 1 页

1.

发明授权
Image forming optical system, imaging apparatus, profile measuring apparatus, structure manufacturing system and structure manufacturing method 有权
标题翻译：成像光学系统，成像装置，轮廓测量装置，结构制造系统和结构制造方法

公开(公告)号：US09205576B2

公开(公告)日：2015-12-08

申请号：US13760745

申请日：2013-02-06

申请人： NIKON CORPORATION , NIKON METROLOGY NV

发明人： Daisuke Kitazawa , Patrick Blanckaert

IPC分类号： G01B11/24 , B29C37/00 , G02B27/00 , G02B13/24

CPC分类号： B29C37/00 , G01B11/24 , G02B13/24 , G02B27/00 , G02B27/0025

摘要： There is provided a measuring apparatus including: an imaging optical system configured to form an image of an object to be measured; and an imaging section including a transmissive member which is arranged in the vicinity of an image plane of the imaging optical system to be inclined with respect an optical axis of the imaging optical system. The imaging optical system includes a first optical member which is non-coaxial with respect to the optical axis.

摘要翻译： 提供了一种测量装置，包括：成像光学系统，被配置为形成待测对象的图像; 以及成像部，其包括配置在所述摄像光学系统的像面附近相对于所述摄像光学系统的光轴倾斜的透射构件。成像光学系统包括相对于光轴不同轴的第一光学构件。