公开(公告)号：US20160003706A1

公开(公告)日：2016-01-07

申请号：US14322912

申请日：2014-07-03

Applicant: NATIONAL APPLIED RESEARCH LABORATORIES

Inventor： Shenq-Tsong CHANG ,  Wei-Cheng LIN ,  Ting-Ming HUANG

IPC: G01M11/02 ,  G01M11/00

CPC classification number: G01M11/0271 ,  G01M11/005

Abstract: A measuring method for an optical element for obtaining a plurality of measurement errors of the optical element is disclosed, which comprises steps of irradiating a laser ray to an overall portion of the optical element, wherein the optical element is supported as one of a horizontal state and a vertical state; rotating continuously the optical element with 360 degrees to reflect the laser ray to obtain a reflected light wavefront picture from the reflected laser ray; analyzing the reflected light wavefront picture to obtain a plurality of aberration characteristics information, respectively, each being one of a sine and a cosine wave functions of a wavefront error for each of the plurality of specified rotation angles; analyzing a plurality of interference factors each for the plurality of measurement errors on each of the plurality of aberration characteristics information, respectively; calculating and extracting a plurality of classified aberration characteristics information for each of the plurality of specified rotation angles of the optical element from each of the plurality of aberration characteristics information according to the plurality of measurement errors, respectively; and analyzing each of the plurality of classified aberration characteristics information to obtain an error amount corresponding to each of the plurality of measurement errors, respectively.

Abstract translation: 公开了一种用于获得光学元件的多个测量误差的光学元件的测量方法，其包括以下步骤：将光线照射到光学元件的整个部分，其中光学元件被支撑为水平状态之一 和垂直状态; 以360度连续旋转光学元件以反射激光，从反射的激光射线获得反射光波前图像; 分析反射光波前图像以获得多个像差特性信息，每个像差特性信息分别是多个指定旋转角度中的每一个的波前误差的正弦波和余弦波函数之一; 分别在多个像差特性信息中的每一个上分析针对多个测量误差的多个干扰因子; 根据多个测量误差，分别从多个像差特性信息中的每一个分别计算和提取用于光学元件的多个指定旋转角度中的每一个的多个分类像差特性信息; 以及分析所述多个分类的像差特性信息中的每一个以分别获得与所述多个测量误差中的每一个对应的误差量。