公开(公告)号：US09810523B2

公开(公告)日：2017-11-07

申请号：US14602259

申请日：2015-01-21

Applicant: NATIONAL APPLIED RESEARCH LABORATORIES

Inventor： Yu-Hsuan Lin ,  Chih-Chung Yang ,  Kuo-Cheng Huang ,  Tai-Shan Liao

IPC: G01B11/08 ,  G01B11/24

CPC classification number: G01B11/08 ,  G01B11/24

Abstract: A method for determining if a wire guide roller having a plurality of V-shaped grooves, each having a copper line thereon, arranged column-by-column on a periphery direction thereof is failed after slicing a plurality of wafers is disclosed. Based on the disclosed technical means, the efficacy may be achieved that a damage situation may be automatically examined and notified to maintain a yield in the slicing process in an online high speed environment.