公开(公告)号：US3835319A

公开(公告)日：1974-09-10

申请号：US14332771

申请日：1971-05-14

Applicant: NAT RES CORP

Inventor： ROEHRIG J ,  TORNEY F

IPC: H01J49/10 ,  H01J49/42 ,  H01J39/34

CPC classification number: H01J49/102

Abstract: Mass spectrometer combination and ion source subcombination therefor. The mass spectrometer has a magnetron ion source, a quadrupole ion analyzer and an ion collector with digital counting read-out and this is useful for residual gas analysis, partial pressure analysis and chemical composition determination and is particularly suited for ultra-high vacuum usage yielding high sensitivity and improved signal-to-noise ratio, consistent with low weight and bulk. The ion source is constructed so that photons are not produced at those loci which can be viewed through the ion exit aperture thereof. Thus, the spectrometer collector is free from impingement thereon of light energy and the signal-to-noise ratio of the instrument is improved thereby.

Abstract translation: 质谱仪组合和离子源子组合。 质谱仪具有磁控管离子源，四极离子分析仪和具有数字计数读数的离子收集器，可用于残留气体分析，分压分析和化学成分测定，特别适用于超高真空使用率 高灵敏度和提高的信噪比，与低重量和体积一致。 离子源被构造成使得光子不会在可以通过其离子出射孔观察的那些轨迹处产生。 因此，光谱仪收集器没有光能的照射，并且因此提高了仪器的信噪比。