NON-CONTACT DEPOSITION SYSTEMS INCLUDING JETTING ASSEMBLIES

    公开(公告)号:US20210129173A1

    公开(公告)日:2021-05-06

    申请号:US17085078

    申请日:2020-10-30

    IPC分类号: B05C5/02 B33Y30/00 B29C64/209

    摘要: A non-contact deposition system comprises a jetting assembly including at least one micro-valve. The micro-valve includes an orifice plate defining an orifice therethrough. An actuating beam disposed in a spaced relationship to the orifice plate. The actuating beam including a base portion and a cantilevered portion extending from the base portion towards the orifice and is movable between a closed position and an open position. A sealing structure comprising a sealing member is disposed at the overlapping portion of the cantilevered portion. A fluid manifold is coupled to the micro-valve and defines a fluid reservoir containing a pressurized fluid. When the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve, and in the open position, the fluid is dispensed from the orifice towards a substrate and deposited thereon.