-
公开(公告)号：US12204258B2
公开(公告)日：2025-01-21
申请号：US18014327
申请日：2021-08-06
Applicant: Magic Leap, Inc.
Inventor： Jeremy Lee Sevier , Satish Sadam , Joseph Michael Imhof , Kang Luo , Kangkang Wang , Roy Matthew Patterson , Qizhen Xue , Brett William Best , Charles Scott Carden , Matthew S. Shafran , Michael Nevin Miller
Abstract: Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.
-
公开(公告)号：US20210283806A1
公开(公告)日：2021-09-16
申请号：US17200239
申请日：2021-03-12
Applicant: Magic Leap, Inc.
Inventor： Jeremy Lee Sevier , Matthew S. Shafran , Satish Sadam , Roy Matthew Patterson , Kangkang Wang , Chieh Chang , Charles Scott Carden
Abstract: In an example method of forming an optical film for an eyepiece, a curable material is dispensed into a space between a first and a second mold surface. A position of the first mold surface relative to the second mold surface is measured using a plurality of sensors. Each sensor measures a respective relative distance along a respective measurement axis between a respective point on a planar portion of the first mold surface and a respective point on a planar portion of the second mold surface. The measurement axes are parallel to each other, and the points define corresponding triangles on the first and second mold surfaces, respectively. The position of the first mold surface is adjusted relative to the second mold surface based on the measured position, and the curable material is cured to form the optical film.
-
公开(公告)号：US11679533B2
公开(公告)日：2023-06-20
申请号：US17200239
申请日：2021-03-12
Applicant: Magic Leap, Inc.
Inventor： Jeremy Lee Sevier , Matthew S. Shafran , Satish Sadam , Roy Matthew Patterson , Kangkang Wang , Chieh Chang , Charles Scott Carden
CPC classification number: B29C39/44 , B29C39/10 , B29C71/04 , B29L2011/0066
Abstract: In an example method of forming an optical film for an eyepiece, a curable material is dispensed into a space between a first and a second mold surface. A position of the first mold surface relative to the second mold surface is measured using a plurality of sensors. Each sensor measures a respective relative distance along a respective measurement axis between a respective point on a planar portion of the first mold surface and a respective point on a planar portion of the second mold surface. The measurement axes are parallel to each other, and the points define corresponding triangles on the first and second mold surfaces, respectively. The position of the first mold surface is adjusted relative to the second mold surface based on the measured position, and the curable material is cured to form the optical film.
-
-
Search Results
3
records
(took 0.014 seconds)
