Optical waveguide structure and method for fabricating the same
    1.
    发明申请
    Optical waveguide structure and method for fabricating the same 有权
    光波导结构及其制造方法

    公开(公告)号:US20040151463A1

    公开(公告)日:2004-08-05

    申请号:US10356550

    申请日:2003-02-03

    Applicant: MOTOROLA, INC.

    CPC classification number: G02B6/132

    Abstract: An optical waveguide structure (10) is provided. The optical waveguide structure (10) has a monocrystalline substrate (12), an amorphous interface layer (14) overlying the monocrystalline substrate (12) and an accommodating buffer layer (16) overlying the amorphous interface layer (14). An optical waveguide layer (20) overlies the accommodating buffer layer (16).

    Abstract translation: 提供一种光波导结构(10)。 光波导结构(10)具有单晶衬底(12),覆盖单晶衬底(12)的非晶界面层(14)和覆盖在非晶界面层(14)上的容纳缓冲层(16)。 光波导层(20)覆盖容纳缓冲层(16)。

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