Measuring apparatus
    1.
    发明授权

    公开(公告)号:US10197374B2

    公开(公告)日:2019-02-05

    申请号:US15248507

    申请日:2016-08-26

    Abstract: A measuring apparatus of the present invention includes a stage on which a measured object is placed, a measurement head having an information obtainer obtaining an image of the object, and a vertical driver supporting the measurement head so as to allow movement in a vertical direction. The vertical driver includes a counterbalance mechanism having a hanger of the measurement head, a pulley winding up and withdrawing the hanger by rotation, a spring increasing elastic force by stretching the spring when the measurement head displaces downward, and a cam rotating in conjunction with the pulley and having a cam shape decreasing rotational torque provided to the pulley by the elastic force as a stretching amount of the spring increases.

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