公开(公告)号：US20210063727A1

公开(公告)日：2021-03-04

申请号：US16673180

申请日：2019-11-04

Applicant: Lumentum Operations LLC

Inventor： Wenlin JIN ,  Stephen BAGNALD ,  Gonzalo WILLS

IPC: G02B26/08 ,  H02N1/00 ,  B81B3/00

Abstract: A micro-sized optical device may comprise a mirror suspended on a set of hinges that are mounted to the substrate and that are configured to tilt the mirror about an axis, wherein a hinge of the set of hinges is a two-layer structure with a pivot point that aligns with a mass center of the mirror; and a three-layer comb actuator structure associated with the hinge of the set of hinges, wherein the three-layer comb actuator structure includes a rotor comb actuator, a first stator comb actuator, and a second stator comb actuator.

公开(公告)号：US20210396993A1

公开(公告)日：2021-12-23

申请号：US16948051

申请日：2020-08-28

Applicant: Lumentum Operations LLC

Inventor： Wenlin JIN ,  Maziar MORADI ,  Gonzalo WILLS ,  Stephen BAGNALD

IPC: G02B26/08 ,  H02N1/00 ,  B81B3/00 ,  G01S7/481

Abstract: A micro-electro-mechanical system (MEMS) device may comprise a first layer that includes a stator comb actuator; a second layer that includes a rotor comb actuator; a mirror structure that includes a mirror; and a first set of hinges and a second set of hinges configured to tilt the mirror structure about a first axis of the MEMS device based on a driving torque caused by the stator comb actuator engaging with the rotor comb actuator. The first set of hinges may be configured to resist a lateral linear force on the mirror structure in a direction associated with the first axis caused by the stator comb actuator engaging with the rotor comb actuator. The second set of hinges may be configured to resist an in-plane torque on the mirror structure about a second axis of the MEMS device caused by the stator comb actuator engaging with the rotor comb actuator.

公开(公告)号：US20190086682A1

公开(公告)日：2019-03-21

申请号：US16040223

申请日：2018-07-19

Applicant: Lumentum Operations LLC

Inventor： John Michael MILLER ,  Stephen BAGNALD

IPC: G02B27/42 ,  G03F7/20 ,  G02B1/118 ,  G02B5/18 ,  G03F7/00

Abstract: A diffractive optical element may include sub-wavelength period stack-and-gap structured layers providing transmissive phase delay at a wavelength. The sub-wavelength period stack-and-gap structured layers may include a set of thin anti-reflection layers that are index matched to an environment or a substrate over a range of fill factors of the sub-wavelength period.

公开(公告)号：US20210278576A1

公开(公告)日：2021-09-09

申请号：US17303194

申请日：2021-05-24

Applicant: Lumentum Operations LLC

Inventor： John Michael MILLER ,  Stephen BAGNALD

IPC: G02B5/18 ,  G02B1/118 ,  G02B27/42 ,  G03F7/00 ,  G03F7/20

Abstract: A diffractive optical element may include sub-wavelength period stack-and-gap structured layers providing transmissive phase delay at a wavelength. The sub-wavelength period stack-and-gap structured layers may include a set of thin anti-reflection layers that are index matched to an environment or a substrate over a range of fill factors of the sub-wavelength period.