MATRIX ADDRESSABLE VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAY

    公开(公告)号:US20240283218A1

    公开(公告)日:2024-08-22

    申请号:US18315400

    申请日:2023-05-10

    Abstract: A vertical-cavity surface-emitting laser (VCSEL) array may include a substrate, a wafer bonding layer over the substrate, and a first metal layer on or within the wafer bonding layer. The first metal layer may include a plurality of first electrodes. The VCSEL array may include an epitaxial region over the first metal layer and the wafer bonding layer. The epitaxial region may be bonded to the wafer bonding layer. The VCSEL array may include a second metal layer over the epitaxial region. The second metal layer may include a plurality of second electrodes. The plurality of first electrodes and the plurality of second electrodes may form a plurality of matrix addressable subarrays of the VCSEL array, where each matrix addressable subarray of the plurality of matrix addressable subarrays includes one or more emitters.

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