公开(公告)号：US11726311B2

公开(公告)日：2023-08-15

申请号：US17247093

申请日：2020-11-30

Applicant: Lumentum Operations LLC

Inventor： Gonzalo Wills ,  Wenlin Jin ,  Jason Blechta ,  Shane H. Woodside

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0083 ,  B81B2201/042 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2203/058

Abstract: A micro-electro-mechanical system (MEMS) device may include a mirror structure suspended from a first hinge and a second hinge that are arranged to enable the mirror structure to be tilted about a tilt axis. The mirror structure may include a first actuator and a second actuator located on opposite sides of the tilt axis. The MEMS device may include a fixed electrode coupled to first actuator to cause the mirror structure to tilt about the tilt axis in a first direction based on a fixed voltage applied to the fixed electrode. The MEMS device includes a driving electrode coupled to the second actuator to cause the mirror structure to tilt about the tilt axis in a second direction opposite from the first direction based on a driving voltage applied to the driving electrode.