公开(公告)号：US20250102354A1

公开(公告)日：2025-03-27

申请号：US18826216

申请日：2024-09-06

Applicant: Leica Microsystems CMS GmbH

Inventor： Nicolas CAMUS

IPC: G01J1/42 ,  G01J1/04

Abstract: A system for characterizing a light beam includes a detector that includes at least one detector unit, and a micro-opto-electromechanical system that includes an array of mirrors. Each mirror is switchable between a first sand a second witching states. In the first switching state, the mirror reflects light emitted by a light source onto the detector. In the second switching state, the mirror reflects the light away from the detector. The system further includes a controller configured to cause a beam profile measurement to be performed on the light detected by the detector unit while selectively switching the mirrors between the first and the second switching states, and an optical unit configured to direct the light in a form of two different input light beams onto the micro-opto-electromechanical system. The controller is configured to cause the beam profile measurement to be performed on each of the two input light beams.