公开(公告)号：US20180321478A1

公开(公告)日：2018-11-08

申请号：US15580288

申请日：2016-06-13

Applicant: LEICA MICROSYSTEMS CMS GMBH

Inventor： Hilmar GUGEL ,  Felix NEUGART ,  Ingo BOEHM

IPC: G02B21/00 ,  G02B5/28 ,  G01N21/64

Abstract: A scanning microscope includes an objective arranged in an illuminating beam path to focus an illuminating light bundle onto a sample. A scanning unit is arranged upstream of the objective to deflect the illuminating light bundle such that it is focused by the objective executes a scanning movement on the sample. A detection unit is arranged in a detection beam path to receive a detection light bundle not deflected by the scanning unit. For spectral influencing of the detection light bundle, the detection unit contains a spectrally selective component which has an active surface with a spectral edge which varies with the location of incidence of the detection light bundle on the active surface. The active surface is arranged in the detection beam path at the location of an image of an objective pupil, or in a position at which a variation of the spectral edge is compensated for.