SURFACE SHAPE MEASURING DEVICE
    1.
    发明申请
    SURFACE SHAPE MEASURING DEVICE 有权
    表面形状测量装置

    公开(公告)号:US20130255396A1

    公开(公告)日:2013-10-03

    申请号:US13852806

    申请日:2013-03-28

    Abstract: A surface shape measuring device includes a substrate, an electrode portion including at least one electrode pattern, the electrode pattern extending on the substrate, a coating layer on the substrate to cover the electrode pattern, and a detector electrically connected to the electrode pattern and detecting a change in a physical quantity of the electrode pattern generated by the deformation of the substrate or the coating layer by an external load applied thereto.

    Abstract translation: 表面形状测量装置包括基板,包括至少一个电极图案的电极部分,在基板上延伸的电极图案,基板上的覆盖电极图案的涂层,以及电连接到电极图案的检测器, 由施加到其上的外部负载由基板或涂层的变形产生的电极图案的物理量的变化。

    ELASTICITY MEASUREMENT DEVICE
    2.
    发明申请

    公开(公告)号:US20210156774A1

    公开(公告)日:2021-05-27

    申请号:US16633205

    申请日:2018-07-24

    Abstract: An elasticity measurement apparatus includes a lower layer structure having first and second openings, first and second deformable membranes covering the first and second openings to define first and second chamber and deformable by pressure within the first and second chambers respectively, a support layer structure on the lower layer structure to protrude and configured to support the first and second deformable membranes to be spaced apart from the elastic body, a driving portion to apply pressure within the first and second chambers to deform the first and second deformable membranes, and first and second deformation detecting portions to detect deformations of first and second deformable membranes. When the pressure within the first and second chambers is increased from a first pressure to a second pressure, the first deformable membrane is deformed with contacting the elastic body, while the second deformable membrane is deformed without contacting the elastic body.

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