公开(公告)号：US10032594B2

公开(公告)日：2018-07-24

申请号：US15121502

申请日：2015-02-23

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Wonho Choe ,  Youbong Lim ,  Holak Kim ,  Jooyoung Park ,  Jongho Seon

IPC: H01J37/32 ,  H01J1/02 ,  B64G1/40

Abstract: The present invention relates to a high efficiency hollow cathode and a cathode system applying the same, and comprises: a tube comprising at least two refractory metal parts; a gas providing unit and a gas outlet which are respectively formed at the distal ends of the tube; and an insert mounted inside the tube. According to the present invention, since the present invention constitutes a hollow cathode using more than two substances, the present invention can not only enhance thermal stability, lifespan and efficiency, but also can reduce costs accordingly.

公开(公告)号：US20160365215A1

公开(公告)日：2016-12-15

申请号：US15121502

申请日：2015-02-23

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Wonho Choe ,  Youbong Lim ,  Holak Kim ,  Jooyoung Park ,  Jongho Seon

IPC: H01J1/02

CPC classification number: H01J1/025 ,  B64G1/405 ,  H01J37/32596

Abstract: The present invention relates to a high efficiency hollow cathode and a cathode system applying the same, and comprises: a tube comprising at least two refractory metal parts; a gas providing unit and a gas outlet which are respectively formed at the distal ends of the tube; and an insert mounted inside the tube. According to the present invention, since the present invention constitutes a hollow cathode using more than two substances, the present invention can not only enhance thermal stability, lifespan and efficiency, but also can reduce costs accordingly.

Abstract translation: 本发明涉及一种高效率中空阴极及其应用的阴极系统，包括：包含至少两个难熔金属部件的管; 气体供给单元和气体出口分别形成在管的远端; 和安装在管内的插入件。 根据本发明，由于本发明构成使用两种以上物质的中空阴极，因此本发明不仅可以提高热稳定性，寿命和效率，而且可以相应地降低成本。