公开(公告)号：US11385149B2

公开(公告)日：2022-07-12

申请号：US16633205

申请日：2018-07-24

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Young-Ho Cho ,  Sunghyun Yoon

IPC: G01N3/42 ,  G01N27/04 ,  G01N27/22 ,  G01N3/06 ,  G01N3/08

Abstract: An elasticity measurement apparatus includes a lower layer structure having first and second openings, first and second deformable membranes covering the first and second openings to define first and second chamber and deformable by pressure within the first and second chambers respectively, a support layer structure on the lower layer structure to protrude and configured to support the first and second deformable membranes to be spaced apart from the elastic body, a driving portion to apply pressure within the first and second chambers to deform the first and second deformable membranes, and first and second deformation detecting portions to detect deformations of first and second deformable membranes. When the pressure within the first and second chambers is increased from a first pressure to a second pressure, the first deformable membrane is deformed with contacting the elastic body, while the second deformable membrane is deformed without contacting the elastic body.