DUAL-DIAPHRAGM ASSEMBLY HAVING CENTER CONSTRAINT

    公开(公告)号:US20230134752A1

    公开(公告)日:2023-05-04

    申请号:US17518350

    申请日:2021-11-03

    IPC分类号: B81B3/00 H04R7/12

    摘要: A MEMS diaphragm assembly comprises a first diaphragm, a second diaphragm, and a stationary electrode assembly spaced between the first and second diaphragms and including a plurality of apertures disposed therethrough. Each of a plurality of pillars is disposed through one of the plurality of apertures and connects the first and second diaphragms. At least one of the first and second diaphragms is connected to the stationary electrode assembly at a geometric center of the assembly.