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公开(公告)号:US11780726B2
公开(公告)日:2023-10-10
申请号:US17518350
申请日:2021-11-03
发明人: Michael Kuntzman , Michael Pedersen , Faisal Zaman , Xin Song , Vahid Naderyan
CPC分类号: B81B3/0021 , H04R7/125 , B81B2201/0257 , B81B2203/0127 , B81B2203/0361 , B81B2203/04 , H04R2201/003
摘要: A MEMS diaphragm assembly comprises a first diaphragm, a second diaphragm, and a stationary electrode assembly spaced between the first and second diaphragms and including a plurality of apertures disposed therethrough. Each of a plurality of pillars is disposed through one of the plurality of apertures and connects the first and second diaphragms. At least one of the first and second diaphragms is connected to the stationary electrode assembly at a geometric center of the assembly.
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公开(公告)号:US11649161B2
公开(公告)日:2023-05-16
申请号:US17385084
申请日:2021-07-26
发明人: Vahid Naderyan , Mohammad Mohammadi , Xin Song
CPC分类号: B81B3/007 , H04R7/04 , B81B2201/0257 , B81B2203/0127 , B81B2203/0361 , B81B2203/04 , B81B2207/012 , B81B2207/056 , H04R2201/003
摘要: A microelectromechanical systems (MEMS) diaphragm assembly comprises a first diaphragm and a second diaphragm. A plurality of pillars connects the first and second diaphragms, wherein the plurality of pillars has a higher distribution density at a geometric center of the MEMS diaphragm assembly than at an outer periphery thereof.
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公开(公告)号:US20230134752A1
公开(公告)日:2023-05-04
申请号:US17518350
申请日:2021-11-03
发明人: Michael Kuntzman , Michael Pedersen , Faisal Zaman , Xin Song , Vahid Naderyan
摘要: A MEMS diaphragm assembly comprises a first diaphragm, a second diaphragm, and a stationary electrode assembly spaced between the first and second diaphragms and including a plurality of apertures disposed therethrough. Each of a plurality of pillars is disposed through one of the plurality of apertures and connects the first and second diaphragms. At least one of the first and second diaphragms is connected to the stationary electrode assembly at a geometric center of the assembly.
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公开(公告)号:US20230027068A1
公开(公告)日:2023-01-26
申请号:US17385084
申请日:2021-07-26
发明人: Vahid Naderyan , Mohammad Mohammadi , Xin Song
摘要: A microelectromechanical systems (MEMS) diaphragm assembly comprises a first diaphragm and a second diaphragm. A plurality of pillars connects the first and second diaphragms, wherein the plurality of pillars has a higher distribution density at a geometric center of the MEMS diaphragm assembly than at an outer periphery thereof.
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