公开(公告)号：US20220181047A1

公开(公告)日：2022-06-09

申请号：US17539660

申请日：2021-12-01

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： JUNG-YONG LEE ,  Kyungmin Kim

IPC: H01B13/00 ,  B82Y40/00 ,  H01B1/22 ,  B82Y30/00

Abstract: There is provided a fabrication method of conductive nanonetworks through adaptation of a sacrificial layer includes: forming nanowire networks on a substrate; forming the sacrificial layer on a front surface of the substrate including the nanowire networks; removing the nanowire networks to expose a surface of the substrate within a region from which the nanowire networks are removed; forming a conductive material on the front surface of the substrate to fill the region, from which the nanowire networks are removed, with the conductive material while forming the conductive material on the sacrificial layer; and forming conductive nanonetworks made of the conductive material which fills the region from which the nanowire networks are removed, by removing the sacrificial layer.